By A.J. van Roosmalen, J.A.G. Baggerman, S.J.H. Brader
This quantity is devoted to the sector of dry (plasma) etching, as utilized in silicon semiconductor processing.
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S c a t t e r i n g , etc. Since there are no further A f i n a l word on t h i s mobility model. scattering quantities I t i s based on comparing α of the conduction c h a r a c t e r i s t i c of t h i s theory, i t with the magnitude of 1/f noise in other proper f i c u l t to design experiments that can confirm t i e s . I t does not say anything about the value the model. We can now d i s c u s s three such exper α should have. 2 χ 10 iments that were put forward in defence of has often been found.
S . R a l l s , W . J . Skocpol et a l . , Phys. Rev. L 5 2 , 228 (84) 29. K. H. Duh. A. v . d . Ziel , Physica 119 B , 249 (83) 30. E. L o h , J . Appl. Phys. 5 6 , 3022 (84) 3 1 . C. M. Huybers, J . A p p l . P h y s . 54, 2504 (83) 32. J . Kilmer, A. v . d . Z i e l , G. Bosman, S o l i d State Electron. 2 6 , 71 (83) 3 3 . M. M i h a i l a , Phys. L e t t . 104A, 157 (84) 34. M. M i h a i l a , Phys. L e t t . 107A, 465 (85) 35. P . H . Handel, Phys. Rev. A 2 2 5 , 745 (80) 36. J . H. E l l i s , C M .
REFERENCES 1. J. , 2. 1981). B. Sakmann and E. , 1983). 3. B. Hille, Ionic Channels of Biological Membranes (Sinauer, Sunderland, MA, 1984). 4. J. Sigworth, ll 300 5. L. Hodgkin Physiol. Fig. 10 underlying Heart-like action potential and currents, from 300 slow Κ chan nels, 500 Na channels, and 500 Ca channels in a 1 farad). mV, μτη^ patch of The potential, is in free-run after scale in millivolts membrane J. _47 (1983) at -100 t = 0. Vertical or picoamps (bottom); horizontal scales in millisecs.
