Download MEMS and Nanotechnology, Volume 2: Proceedings of the 2010 by Jon R. Pratt, Gordon A. Shaw, Douglas T. Smith (auth.), Tom PDF

By Jon R. Pratt, Gordon A. Shaw, Douglas T. Smith (auth.), Tom Proulx (eds.)

The eleventh overseas Symposium on MEMS and Nanotechnology is the second one quantity of six from the yearly convention of the Society for Experimental Mechanics 2010. It brings jointly forty chapters on Microelectromechanical structures and Nanotechnology. It offers early findings from experimental and computational investigations on MEMS and Nanotechnology together with contributions on Nanomechanical criteria, Magneto-mechanical MEMS Sensors, Piezoelectric MEMS for power Harvesting, and Linear and Nonlinear Mass Sensing.

Show description

Read Online or Download MEMS and Nanotechnology, Volume 2: Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics PDF

Similar applied books

Applied Scanning Probe Methods XIII: Biomimetics and Industrial Applications

The volumes XI, XII and XIII study the actual and technical starting place for contemporary growth in utilized scanning probe strategies. the 1st quantity got here out in January 2004, the second one to fourth volumes in early 2006 and the 5th to 7th volumes in past due 2006. the sector is progressing so speedy that there's a want for a suite of volumes each 12 to 18 months to seize most recent advancements.

Applied Bioinformatics: An Introduction

Stressed via cryptic desktop courses, algorithms and formulae? during this e-book, someone who can function a laptop, ordinary software program and the web will learn how to comprehend the organic foundation of bioinformatics of the lifestyles in addition to the resource and availability of bioinformatics software program the way to practice those instruments and interpret effects with self assurance.

Understanding and Modeling Förster-type Resonance Energy Transfer (FRET): FRET from Single Donor to Single Acceptor and Assemblies of Acceptors, Vol. 2

This short provides a whole examine of the generalized idea of Förster-type power move in nanostructures with combined dimensionality. the following the purpose is to procure a generalized idea of worry together with a finished set of analytical equations for all mixtures and configurations of nanostructures and deriving established expressions for the dimensionality concerned.

Extra info for MEMS and Nanotechnology, Volume 2: Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics

Example text

In order to eliminate taper in the final specimens, lathe-type secondary milling is performed using a program developed by Uchic and Dimiduk. 5 µm, so care is taken to fabricate these specimens using top-down concentric annular cuts, resulting in micropillars with tapered sides of a few degrees. Final micropillars for these experiments have a length that is twice that of the diameter, resulting in an aspect ratio of 2. Using an aspect ratio above 2 could potentially result in buckling, while using anything lower than 2 may result in non-uniform stress measures.

The optimal resistive load of IDE can be evaluated by equation (3~5) [15, 16]: (3) · · (4) 1 (5) where f is resonant frequency, C is capacitance, εr is dielectric constant, ε0 is permittivity of vacuum, A is electrode area, l is distance between electrodes, W is width of finger electrode, t is film thickness, and N is the number of finger electrodes. Moreover, a dead zone is formed due to non-uniform poling direction, which is perpendicular to the electrode coordination under electrodes area. The entire PZT film cannot be contributed to the piezoelectric conversion so that its volumetric efficiency decreases.

39 CONCLUSIONS In this paper, piezoelectric micro power generators with two different piezoelectric modes were designed and fabricated for their comparison. Well-crystallized PZT thin films were confirmed by XRD and microstructural analysis. 5 g acceleration force, their output voltage, current, and power were compared. 72 µW and 70 µA was obtained under 11 kΩ of optimal resistive load. 675 Vp-p but its power and current were too low for its applications. Although the {3-3} mode using interdigitated electrodes still requires further study, such as optimizing IDE configuration and poling conditions, the {3-1} mode satisfies the requirements for now.

Download PDF sample

Rated 4.30 of 5 – based on 43 votes

About admin